AdvancedMechatronicsandMEMSDevicesII2017.pdf

AdvancedMechatronicsandMEMSDevicesII2017.pdf
SpringerInternationalPublishingSwitzerland2017Thisbookconsistsof30chapters.Chapter1presentsthetheoryandapplicationofactuationofelastomericmicro-devicesviacapillaryforcetechnology.Chapter2providesinsightintothefundamentaldesign,workingprinciples,andpracticalguidanceofMEMSaccelerometers.Detailsofexperimentalsetups,signalconditioning,anddataprocessingarealsoprovidedtoconstructanintegratedperformanceassessmentsystem.Chapter3givesanoverviewoftheimpactofthechangefromafocusonanalysis,simulation,andmodelingcombinedwithoutsourcinghardwaredesigntotheuseofdigitalfabricationtoolsallowingacyclicdesignprocessinsidethelab,usingmanyexamplesfromvariousprojects,andsharessomeinsightsandlessonslearnedforfacilitatingandimplementingthisprocess.Chapter4presentsthedesignofafamilyofmicro-robotscapableofobjectmanipulationinafluidicenvironment.Chapter5discusseshowstate-of-theartmobiletechnologiesmaybeintegratedintohuman-in-the-loopcyber-physicalsystemsandexploitedtoprovidenaturalmappingsforremoteinteractionswithsuchsystems.Ademonstrativeexampleisusedtoshowhowanintuitivemetaphorisuncoveredforperformingabalancingtaskthroughtheteleoperationofaballandbeamtestbed.Chapter6providesanoverviewonforce/tactilesensordevelopment.Byexploitingoptoelectronictechnology,twotactilesensorsthatcanbeusedtoexecutebothfinemanipulationofobjectsandsafeinteractiontaskswithhumansaredesignedandrealized.Chapter7addressesabriefaccountofissuesrelatedtomechanicalpropertiesofMEMS.Micro-testingtechniquesincludingmicrotensileandmicro-fatiguetestingalongwiththehardwarearedescribedwithtypicalsampletype,shape,andgeometry,depictedwithdiagramsandimages.Chapter8studiesatypeofmarmot-likerescuerobotforminesafetydetectionandrescuing.Thekinematics,maximumstiffness,minimumstiffness,andglobalstiffnessoftheheadsectionoftherescuerobotaremodeledandanalyzed.Chapter9presentsasystematicreviewofkeycontrolschemesforreconfigurableroboticsystems,highlightingtheirbenefitsanddisadvantages,andalsoreviewstheapplicationofthesesystemsatmicroscale.Chapter10givesadetailedoverviewofMEMSbasedsensorsandactuators.Chapter11proposesanovelsensingapproachtoinsituparticulatematerial(soot)loadmeasurementinadieselparticulatefilterusingelectricalcapacitancetomography(ECT).Chapter12providesanoverviewofthreeactuationmechanismsthatarerelevantforbiomedicalapplicationsofmicrofluidics.Thetopicsdealtwithincludedielectrophoresis,acoustophoresis,andmagnetophoresis.Chapter13reviewsafewmechatronicdevicesdesignedandusedinASDscreeninganddiscussesafewdevicesusedfortherapeuticpurposes.Chapter14conductsacriticalandthoroughreviewonvapor/gassensingpropertiesofawiderangeofelectrochemicallyderivedmetaloxidenano-formsasthesensinglayeremployingadifferentdeviceconfiguration.Chapter15developsawearablebloodpressuremonitoringsystemusingultrasoundandamicroperfusionsystemusingametalneedlewithmicro-flowchannelformeasurementofsubepidermalbiologicalsubstances.Chapter16discussesthefabricationstrategiesandmaterialsforthedevelopmentofphysical,chemical,andbiosensors.Theemergingapplicationsofflexibleelectronicsinwoundhealing,wearableelectronics,implantabledevices,andsurgicaltools,aswellaspoint-of-carediagnosticdevices,arealsoexplored.Chapter17presentsseveralMEMSdeviceswherethemainapplicationisagriculture.Chapter18showsthedesign,fabrication,andtestingofamultifunctionalMEMSsensorforuseinhydraulicsystems.TheMEMSdeviceisincorporatedintoatypicalfluidpowercomponent.Chapter19proposesapiezoelectric-actuatedrigidnano-needleforsinglecellwall(SCW)cutting.Afabricatedtungsten(W)nano-needleisassembledwithacommercialpiezoelectricactuatorlaterallyandperpendicularly.Chapter20developsaprocessplanning-drivenapproachforthedevelopmentofaroboticpercussiverivetingsystemforaircraftassemblyautomation.Chapter21introducesphotoinducedfabricationtechnologiesfor3DMEMSdevicesandexaminesfourtechnologiesandtheiroutcomeofapplicationswherefabricatedfeaturesizesdecreaseandresolutionincreases.Chapter22presentsadesignprincipleoftheOKESbyderivingamathematicalmodelandcharacterizedtheOKESperformanceintermsofworkingrange,positioningaccuracy,resolution,linearity,bandwidth,andcontroleffectivenesswiththenano-positioningsystems.Chapter23presentsalab-on-chipmicrofluidicssystemforSCMmeasurement,relatedtotheforcerequiredtodragasinglecellandNewton’slawofmotioninsidemicrofluidicschannel.Chapter24focusesonthecharacteristicsofmicromanipulationintermsofthetypesandprinciplesofgrippingforces.Chapter25discussesthreeimportantaspectsofinertialmicrofluidics:fundamentalmechanism,microchanneldesigns,andapplications.Chapter26providesadetailedoverviewofthedifferenttypesofpiezoelectricforcesensorsandthedynamiccalibrationtechniquesthathavebeenusedtocalibratethesesensors.Chapter27introducesamagneticallydrivenmicro-roboticssystemtoexplaintheprocedureofdevelopingamagneticlevitationstageandproposesasensorswitchingmechanismthatcombinesmagneticfluxmeasurement-basedpositiondeterminationandopticalsensor-basedpositiondetection.Chapter28applies3Dprintingmoldingmethodstofabricateaminiaturemagneticactuatorforanopticalimagestabilizer,andtheapplicationofrobustcontroltechniquestoactuatethedevelopedminiaturemagneticactuatorsisdiscussed.Chapter29dealswiththeconceptofbiofeedbackcontrolsystemsanditsstructure,andvariousapplicablecontrolmethodswhicharedesignedtofulfilldifferentsystemrequirementsareprovided.Chapter30developsaninverseadaptivecontrollerdesignmethodforthepurposeofmitigatingthehysteresiseffectinthemagnetostrictive-actuateddynamicsystems. 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